Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

نویسندگان

  • Bo Lenssen
  • Yves Bellouard
چکیده

Related Articles Electromagnetically induced transparencies in a closed waveguide with high efficiency and wide frequency band Appl. Phys. Lett. 101, 093502 (2012) Enhanced optical limiting in nanosized mixed zinc ferrites Appl. Phys. Lett. 100, 221108 (2012) Electromagnetically induced transparency in terahertz plasmonic metamaterials via dual excitation pathways of the dark mode Appl. Phys. Lett. 100, 131101 (2012) Electromagnetically induced transparency with quantum interferometry J. Chem. Phys. 136, 084301 (2012) Huge enhancement of optical nonlinearities in coupled Au and Ag nanoparticles induced by conjugated polymers Appl. Phys. Lett. 100, 023106 (2012)

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fu...

متن کامل

Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass.

The ability of 8 picosecond pulse lasers for three dimensional direct-writing in the bulk of transparent dielectrics is assessed through a comparative study with a femtosecond laser delivering 600 fs pulses. The comparison addresses two main applications: the fabrication of birefringent optical elements and two-step machining by laser exposure and post-processing by chemical etching. Formation ...

متن کامل

CHARACTERIZATION OF MICRO/NANO POROUS HOLLOW GLASS MICROSPHERES FABRICATED THROUGH VARIOUS CHEMICAL ETCHING PROCESSE FOR USE IN SMART COATINGS

Porous hollow glass microspheres have many uses, including encapsulation of active materials. In this paper a fast and facile method for fabricating porous hollow glass-microspheres was demonstrated by etching them using dilute hydrofluoric acid. Then, a highly reactive amine was infiltrated into the etched glass microspheres. Scanning electron microscopy was conducted for the hollow glass micr...

متن کامل

Femtosecond laser fabrication of integrated optical waveguides and microfluidic channels for lab-on-chip devices

We use a femtosecond laser to fabricate on a glass substrate both microfluidic channels and high quality optical waveguides, intersecting each other. Waveguide-channel integration opens new prospects for in-situ sensing in lab-on-chip devices. Introduction A lab-on-chip (LOC) is a device that squeezes onto a single glass substrate the functionalities of a biological laboratory, by incorporating...

متن کامل

On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]

This paper reports on the mechanical properties of fused silica flexures manufactured by a two-step process combining femtosecond lasers exposure below the ablation threshold and chemical etching. Flexural strengths as high as 2.7 GPa were measured, demonstrating that femtosecond lasers can be efficiently used to produce arbitrarily shaped high-strength mechanical devices, opening new opportuni...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2012